| http://www.w3.org/ns/prov#value | - The substrate tiles are held in X and Y position, for example and without limitation, with respect to adjacent ones of the substrate tiles so that the probe tips are held in X and Y registration in a test plane, for example, a plane that substantially coincides with a bottom surface of a test wafer, and the substrate tiles are aligned so that the probe tips are substantially coplanar to the test p
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