| http://www.w3.org/ns/prov#value | - The film has more than two layers of at least two compounds consisting mainly of carbide, nitride, carbonitride or oxide of at least one element selected from a group consisting of IVa group elements, Va group elements, VIa group elements, Al,...http://www.google.com/patents/US5700551?utm_source=gb-gplus-sharePatent US5700551 - Layered film made of ultrafine particles and a hard composite material
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