| http://www.w3.org/ns/prov#value | - Characteristics such as crystalline structure, surface morphology, hardness and chemical composition as a function of the Si content were investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), field emission scanning electron microscope (FE-SEM), transmission electron microscope (TEM), atomic force microscopy (AFM), microhardness testing system and energy dispersive spect
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