| http://www.w3.org/ns/prov#value | - The light shielding film 72 is provided with a pattern 73 of the similar shape, for example rectangular, to the pattern to be transferred to a photoresist surface on a wafer. (In FIG. 8, only one pattern 73 is illustrated for explanatory convenience.) The pattern 73 is transferred by light having a specific wavelength (ultraviolet region) onto the photoresist formed on a wafer surface to be develo
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