| http://www.w3.org/ns/prov#value | - The insulating layer 162 can be formed of a single layer or stacked layer including an insulating layer containing oxygen or nitrogen, such as silicon oxide, silicon nitride, or silicon oxynitride, a layer containing carbon, such as DLC (Diamond Like Carbon), an organic material such as epoxy, polyimide, polyamide, polyvinyl phenol, benzocyclobutene, or acrylic, or a siloxane material such as a si
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