| http://www.w3.org/ns/prov#value | - BRIEF DESCRIPTION OF THE DRAWINGS The above and other aspects and advantages of the present invention will become more apparent when described in detailed exemplary embodiments thereof with reference to the attached drawings in which: FIGS. 1A and 1B are cross-sectional views of a STI structure with dents formed when a liner layer is comprised of nitride, according to the prior art; FIGS. 2A and 2
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