| http://www.w3.org/ns/prov#value | - The method includes: providing a substrate having a first electrode thereon; providing at least one alcohol of the formula R(OH)r wherein R is an organic group and r is 1 to 3; providing at least one metal-containing precursor compound of the formula M1(NR1)w(NR2R3)z (Formula I), M2R4 q (Formula II), or Lewis Base adducts of Formula II; vaporizing the precursor compounds to form vaporized precurso
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