| http://www.w3.org/ns/prov#value | - FIELD AND BACKGROUND OF THE INVENTIONThe present invention relates to surface inspection systems and methods and, more particularly, to the inspection of articles or workpieces, such as silicon wafers, to detect the presence of defects such as particles or pits on the surface and to distinguish therebetween.Surface inspection systems are commonly used for the inspection of articles or workpieces s
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