| http://www.w3.org/ns/prov#value | - Therefore, a blocking film such as a silicon nitride film is formed on the substrate, preventing contaminating impurities containedin the glass substrate from diffusing, and preventing a lowering of reliability.However, as a result of analyzing the contaminating impurity concentration in a TFT, the contaminating impurity concentration of the interface between films structuring the TFT is between 5
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