| http://www.w3.org/ns/prov#value | - The substrate 16 can, for example, be some sort of semiconductor wafer or some portion thereof comprising various layers of different semiconducting material, such as polysilicon, single crystal silicon, etc, although the particular construction of the substrate is not important to the construction or function of the apparatus described herein. [0021] The tapered portion 20 of the beam includes a
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