| http://www.w3.org/ns/prov#value | - The support fluid can be water, glycerin, air, or other suitable fluids that support the elastic membrane in a manner that allows both the membrane and the planarizing medium to flex inward toward the fluid chamber under the influence of a mechanical force. [0012] In operation, a substrate carrier assembly presses a microelectronic substrate assembly against a planarizing surface of the planarizin
|
