| http://www.w3.org/ns/prov#value | - Thus, a high temperature, high density plasma can be generated even near the wall surface of the vessel. 13) The power supply apparatus described in any one of the aspects 5) to 10), which may include a plurality of types of power sources for supplying high frequency voltages of different frequencies, and wherein the high frequency power source for an output voltage of the lowest frequency may be
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