| http://www.w3.org/ns/prov#value | - Thus, the pulse laser beam 101 does not irradiate or damage other components including the condenser ellipsoidal mirror 108, the first mirror 131 and other components by aligning the optical axis of the pulse laser beam 101 with the direction AA???, providing the condenser ellipsoidal mirror 108 with passage part through which the pulse laser beams that enter or exit the target 104 pass, and arran
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