| http://www.w3.org/ns/prov#value | - When the detection electrodes of the humidity sensor are formed of a porous material that is formed from a noble metal, such as Pt or Au which exhibits excellent heat resistance and corrosion resistance and has an average pore size greater than that of the moisture-sensitive layer, strong adhesion can be attained among an insulating substrate, the detection electrodes, and the moisture-sensitive l
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