| http://www.w3.org/ns/prov#value | - The piezoelectric sensing element may be passivated to electrically isolate the piezoelectric sensing element when, for example, a conductive fluid is placed in the internal cavity of the liquid cell used for AFM. The piezoelectric sensing element may be passivated with a material such as silicon nitride, silicon dioxide, parylene, Teflon???, an insulating polymer, or a suitable insulating materia
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