| http://www.w3.org/ns/prov#value | - Therefore, if information obtained by the secondary ion detector 18 and information obtained by the full ion detector 20 are compared with each other by a comparing means such as a ratio amplifier, any influence of the variation of a primary ion current, unevenness of the surface of the sample, and degeneration layer such as an oxidation layer of the surface of the sample as a result of analysis c
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