| http://www.w3.org/ns/prov#value | - The fourth region 54 of the second plate 48 generally coincides with where the second plate 48 may be structurally interconnected with an annular support 64 (e.g., fabricated in P4 layer 30) of the MEMS flow module 34, but in any case is a portion of the second plate 48 that is at least substantially maintained in a fixed orientation throughout operation of the MEMS flow module 34 for the anticipa
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