About: http://webisa.webdatacommons.org/308348371

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A ferroelectric capacitor structure according to claim 5 wherein the insulation layer including silicon is a silicon dioxide layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com