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http://webisa.webdatacommons.org/308405244
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Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value
forming an actuating element over the sacrificial layer within the actuating area, including communicating the actuating element with the conductive material of the actuating area through the sacrificial layer; and
http://www.w3.org/ns/prov#wasQuotedFrom
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