PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • In this manner, unlike most methods and systems that are designed to suppress this noise in the output, the method and system embodiments described herein advantageously use this noise as a proxy for a characteristic of the wafer.
http://www.w3.org/ns/prov#wasQuotedFrom
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