About: http://webisa.webdatacommons.org/308471707

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	nd dielectric layer 160 which are filled with a conducting material (usually tungsten, aluminum, titanium, copper, and other suitable metals and alloys) to provide electrical contact to the patterned conducting layers 150 and 155.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com