About: http://webisa.webdatacommons.org/308484853

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In yet another embodiment, the sacrificial material 6 may be a polymer material, such as polyimide, photoresist, or polymethyl methacrylate (PMMA).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com