About: http://webisa.webdatacommons.org/308673219

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Incidentally, the exposure light L for forming the patterns in the first through third embodiments is not restricted to ultraviolet or far ultraviolet light; rather, electron beams, X-ray, or other exposing techniques can be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com