| http://www.w3.org/ns/prov#value | - In addition, as illustrated in FIGS. 12B and 12C, at the lower surface of the multilayer substrate 10, a solder ball 60 to mount BGA (Ball Grid Array) on the mother board is arranged in the form of matrix to the area except for the area where the optical waveguides are formed in parallel in a plurality of lines.
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