About: http://webisa.webdatacommons.org/308698059

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the case, the barrier metal film 414 is preferably made of metal such as Ti, Wor Ta, or nitride metal, or lamination of metal and nitride metal.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com