PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • In the next step of the process, a cobalt layer 32 is blanket deposited on top of the semiconductor structure 10 by a technique such as sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com