About: http://webisa.webdatacommons.org/308832352

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In still a further embodiment of the present application, a device is provided including a piezoelectric element having a piezoelectric element structure with a thickness of between 5 ??m to 100 ??m formed by a deposition process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com