About: http://webisa.webdatacommons.org/308899742

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The laser irradiation apparatus functions for oscillating a laser, for example an XeCl excimer laser, and an optical system like that shown in FIGS. 3A and 3B are installed in the laser irradiation apparatus.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au