About: http://webisa.webdatacommons.org/309091759

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thereafter, a film of an appropriate material such as aluminum or tantalum is deposited by a well-known metallization method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com