About: http://webisa.webdatacommons.org/309181163

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The difference in the chemical composition affected the electrical properties such as leakage current and capacitance-voltage characteristics, which are related to the defects in the film and interface state.
http://www.w3.org/ns/prov#wasQuotedFrom	science.gov