About: http://webisa.webdatacommons.org/30924255

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, where a semiconductor material, such as polycrystalline silicon is to be deposited, a silicon-containing gas, such as silane, or halogenated silane, such as dichlorosilane, is introduced.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr