About: http://webisa.webdatacommons.org/309317324

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The CVD process can be used to deposit many elements and alloys as well as compounds including oxides, nitrides and carbides.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com