About: http://webisa.webdatacommons.org/309572759

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thereafter, an oxide film 206 is formed by low-pressure CVD (LPCVD) techniques on the gate oxide film 205 and electrodes 207, 209 as well as element separation region 203, to a thickness of for example 20 nm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com