About: http://webisa.webdatacommons.org/309599288

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The phase change material 940 that surrounds side walls of the conductive layer 350 and the insulating layer 340 is anisotropically etched in areas other than the areas covered by the photoresists 1210, 1220.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es