About: http://webisa.webdatacommons.org/309607868

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The sections of the interconnect 140 and the dielectric structure 170 can be removed by grinding, dry etching, chemical etching, chemical polishing, chemical-mechanical polishing, or other suitable processes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com