PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The etch stop layer 710 preferably comprises a dielectric material, such as silicon nitride, silicon oxynitride, or the like.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com