PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The thickness, morphology, porosity, resistivity and other characteristics of the material can be modulated through choices of silicon wafer precursor and etching conditions known to those skilled in the art.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com