About: http://webisa.webdatacommons.org/309882614

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The slit valve door 4 and inner surfaces of the reaction chamber 9 are typically made of the same material (generally metals, such as aluminum) and are generally made so as to be resistant to chemical attack.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com