About: http://webisa.webdatacommons.org/309980220

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the layer to be polished is a uniform material with an irregular surface topography, CMP is a relatively simple process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com