About: http://webisa.webdatacommons.org/310000787

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The etching process, especially during the second step, is preferably carried out with the exclusion of radiation which may produce photoconductive effect in the material of the zone, for example in the dark.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com