About: http://webisa.webdatacommons.org/310016549

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This term encompasses the integration of optical devices on small substrates, using such methods as photolithography, in much the same manner that they are employed in the fabrication of integrated circuitry.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de