About: http://webisa.webdatacommons.org/310254151

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The tungsten hexafluoride is pulsed at a rate of between about 1 sccm and about 100 sccm, such as between about 5 sccm and about 50 sccm, for about 0.3 seconds.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com