About: http://webisa.webdatacommons.org/310255946

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The polymer layer 220 may be polyimide or other polymer material, formed by any suitable technique such as spin coating process using photo-imaging lithography.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com