About: http://webisa.webdatacommons.org/310448147

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, patterning is performed by a known method such as the photolithography.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com