About: http://webisa.webdatacommons.org/310655920

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The second silicon nitride layer resulted in a wet etch rate (6:1 BOE) of about 300 ???/min or greater, such as between about 350 ???/min and about 800 ???/min.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com