About: http://webisa.webdatacommons.org/311041388

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The gate insulating film 708 with a thickness of 40 to 150 nm is formed by a plasma CVD method or a sputtering method with an insulating film including silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk