About: http://webisa.webdatacommons.org/311510447

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A thick layer of dielectric material, e.g. CVD silicon dioxide, TEOS silicon dioxide, p-glass or the like, designated 93 in FIG. 8C, is then deposited to fill the trenches 86.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com