About: http://webisa.webdatacommons.org/311734906

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A device according to claim 20, wherein the semiconductor device is a thin film transistor including an active layer of said crystalline semiconductor film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com