About: http://webisa.webdatacommons.org/311864158

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Each of the electrostatic chucks includes a plurality of layers such as electrode layer, dielectric layer, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com