About: http://webisa.webdatacommons.org/311900362

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	al polishing, an oxygen strip, or other suitable process. [0104] The metallization structure is then formed with a conductive material such as aluminum, copper, tungsten or combinations thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com